The current semiconductor model continues to give birth to a large number of design engineers who areproducing a large number of chips, but without any interaction with process/device people. This book highlights major issues/challenges and provides solutions to current advanced nodes of the semiconductor industry. It covers very real issues faced by engineers in their day-to-day activities, with concrete thought through solutions provided by industry experts. This reference provides a very practical and yet highly advanced tutorial on some of the important and relevant topics, such as deep sub-wavelength lithography, stress engineering, and developments in the EDA arena to support designs in the nano-CMOS arena.