LIGA and its Applications

This volume is divided into two major parts following a general introductory chapter: the reliability of materials and that of devices. In the first part, the mechanical properties of the materials used in MEMS are examined and the necessary measuring technologies explained in detail - nanoindenters, bulge methods, bending tests, tensile tests, and others. Part two treats the actual devices, organized by important device categories such as pressure sensors, inertial sensors, RF MEMS, and optical MEMS.